Semiconductors

Toyo Tanso develops and produces high-purity and coated graphite-, and C/C components for the polysilicon production, crystal growing and various wafer processing methods such as MOCVD, EPI, and CVD/PVD.

Our product portfolio not only includes heater, support crucibles, heat shields, and insulating components for many single crystal growing processes, but also susceptors for silicon epitaxy and MOCVD (metal organic chemical vapor deposition) reactors.

Utilizing the purification furnace at GTD and the existing modern production facilities at Toyo Tanso we are able to realize components in various styles and purity levels, according to your needs.

Your consultant for semiconductor applications:

Marco Balzer

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If you have questions on our products, please do not hesitate to contact us.

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